DSdsV2_2 Weibull_7F+d,TAʸ2 Level Full Factorial DesignDFoliopB  1234567           V `       `    Continuous21210Low  ? ʡ)@     Oscillating21210Low ? ?7 sh|,@     Continuous61210Low ? ?_ |?5,@     Oscillating61210Low ?? ?9 ̌+@     Continuous21220Low ? ? jt+@     Oscillating21220Low ?? ?# (\5+@     Continuous61220Low ?? ?W Dli+@     Oscillating61220Low ??? ? Zd;,@     Continuous21210High ? ? Pn-@      Oscillating21210High ?? ?V .@      Continuous61210High ?? ?+ 5^I B-@      Oscillating61210High ??? ?Y ?5^I,@      Continuous21220High ?? ?< '1+@      Oscillating21220High ??? ?  Cl*@     Continuous61220High ??? ?G +@     Oscillating61220High ???? ? V-r+@     Continuous21210Low  ?T V)@     Oscillating21210Low ? ?C +@     Continuous61210Low ? ? |?5^+@     Oscillating61210Low ?? ?A y&1,-@     Continuous21220Low ? ?8 Cl+@     Oscillating21220Low ?? ?5 zGa*@     Continuous61220Low ?? ? ">+@     Oscillating61220Low ??? ?! v,@     Continuous21210High ? ?] uVN,@     Oscillating21210High ?? ? FԸ,@     Continuous61210High ?? ?  zG+@     Oscillating61210High ??? ?- ++@     Continuous21220High ?? ?" v,@     Oscillating21220High ??? ?' Dl*@     Continuous61220High ??? ?` n+@     Oscillating61220High ???? ? +@      Continuous21210Low  ? J +V+@! !    Oscillating21210Low ? ?^ zG!*@" "    Continuous61210Low ? ?F ET+@# #    Oscillating61210Low ?? ?  5^I ,@$ $    Continuous21220Low ? ?& V--@% %    Oscillating21220Low ?? ?$ p= c+@& &    Continuous61220Low ?? ?M Qk,@' '    Oscillating61220Low ??? ?. Y-@( (    Continuous21210High ? ?B S㥛D,@) )    Oscillating21210High ?? ? E+@* *    Continuous61210High ?? ? ;O,@+ +    Oscillating61210High ??? ?E M,@, ,    Continuous21220High ?? ?N bX9,@- -    Oscillating21220High ??? ?? #~j,@. .    Continuous61220High ??? ? /$-@/ /    Oscillating61220High ???? ?O ~jt-@0 0    Continuous21210Low  ? rh+@1 1    Oscillating21210Low ? ?  K7I*@2 2    Continuous61210Low ? ?J xi-@3 3    Oscillating61210Low ?? ?> ̌+@4 4    Continuous21220Low ? ?( S+@5 5    Oscillating21220Low ?? ?P S㥛,@6 6    Continuous61220Low ?? ? /$,@7 7    Oscillating61220Low ??? ? /$,@8 8    Continuous21210High ? ?S !rh,@9 9    Oscillating21210High ?? ?/ &1,@: :    Continuous61210High ?? ?, ~jt-@; ;    Oscillating61210High ??? ? 5^I -@< <    Continuous21220High ?? ?= B`",@= =    Oscillating21220High ??? ?I (\,@> >    Continuous61220High ??? ?@ -@? ?    Oscillating61220High ???? ?: V--@@ @    Continuous21210Low  ?\  ףp=J,@A A    Oscillating21210Low ? ?D "~j+@B B    Continuous61210Low ? ?X `"۹+@C C    Oscillating61210Low ?? ?H $*@D D    Continuous21220Low ? ?% 7A`,@E E    Oscillating21220Low ?? ?  B`",@F F    Continuous61220Low ?? ? Pn-@G G    Oscillating61220Low ??? ? 7A`P+@H H    Continuous21210High ? ?U --@I I    Oscillating21210High ?? ?[ V--@J J    Continuous61210High ?? ?L Zd;ߏ.@K K    Oscillating61210High ??? ?Z K7A`.@L L    Continuous21220High ?? ?* A`"+@M M    Oscillating21220High ??? ?3 w/+@N N    Continuous61220High ??? ?0 y&1,@O O    Oscillating61220High ???? ?Q 㥛 ,@P P    Continuous21210Low  ?; $,@Q Q    Oscillating21210Low ? ? (\,@R R    Continuous61210Low ? ? X9ȶ*@S S    Oscillating61210Low ?? ?  $*@T T    Continuous21220Low ? ?4 ++@U U    Oscillating21220Low ?? ?R V-r,@V V    Continuous61220Low ?? ? K7,@W W    Oscillating61220Low ??? ?2 -'+@X X    Continuous21210High ? ?6 )\.@Y Y    Oscillating21210High ?? ? J +.@Z Z    Continuous61210High ?? ? d;O.@[ [    Oscillating61210High ??? ? jt-@\ \    Continuous21220High ?? ?) S%.@] ]    Oscillating21220High ??? ?K v+@^ ^    Continuous61220High ??? ?  r,@_ _    Oscillating61220High ???? ?1 V-+@` `  ư>?      @@@@v@v@TahomaDBTahomaDB ????{Gz?{Gz?{Gz??333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z   CB ???d Upper Legend Lower LegendCurrent Upper TitleCurrent Lower TitleCurrent Main TitleCurrent X-Axis TitleCurrent Y-Axis TitleColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****Z      ? ? ? ?    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Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time   Thickness   I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD                   Block 1    1    Continuous Oscillating 26 @@ LowHigh  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time`       1 1 $9 =##X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p   p@@ p@ p @  p8 @ p@ p p8 8 p@ p p   p8 8 Design   dMbP?_*+%&A Page &P&?'?(?)?"d??` Q_ ThicknessD:Deposition Time C:Deposition Temperature B:Nozzle Position "A:Susceptor-Rotation Method  Block NumberCenter Points Run OrderStandard Order}F}A F}F}B F}F}GF} F                                 ! " # $ % & ' ( ) * + , - . / 0 1 2 3 4 5 6 7 8 9 : ; < = > ? @ A B C D E F G H I J K L M N O P Q R S T U V W X Y Z [ \ ] ^ _ ?8@?? Continuous@@ Lowʡ)@~ ?@K@?? Oscillating@@ Lowsh|,@~ @@W@?? Continuous@@ Low|?5,@~ @@L@?? Oscillating@@ Low̌+@~ @@ @?? Continuous@@ Lowjt+@~ @@A@?? Oscillating@@ Low(\5+@~ @@U@?? Continuous@@ LowDli+@~ @ @9@?? Oscillating@@ LowZd;,@~  @"@=@?? Continuous@@ HighPn-@~ "@ $@U@??  Oscillating @@ High .@~ $@ &@E@??  Continuous @@ High 5^I B-@~ &@ (@@V@??  Oscillating @@ High ?5^I,@~ (@ *@N@??  Continuous @@ High '1+@~ *@ ,@*@??  Oscillating @@ High Cl*@~ ,@.@Q@?? Continuous@@ High+@~ .@0@@?? Oscillating@@ HighV-r+@~ 0@1@U@?? Continuous@@ LowV)@~ 1@2@P@?? Oscillating@@ Low+@~ 2@3@@?? Continuous@@ Low|?5^+@~ 3@4@@P@?? Oscillating@@ Lowy&1,-@~ 4@5@L@?? Continuous@@ LowCl+@~ 5@6@J@?? Oscillating@@ LowzGa*@~ 6@7@3@?? Continuous@@ Low">+@~ 7@8@@@?? Oscillating@@ Lowv,@~ 8@9@@W@?? Continuous@@ HighuVN,@~ 9@:@?@?? Oscillating@@ HighFԸ,@~ :@;@&@?? Continuous@@ HighzG+@~ ;@<@F@?? Oscillating@@ High++@~ <@=@A@?? Continuous@@ Highv,@~ =@>@C@?? Oscillating@@ HighDl*@~ >@?@X@?? Continuous@@ Highn+@~ ?@@@@?? Oscillating@@ High+@~ @@ @@.@??  Continuous @@ Low J +V+@~ @@!A@W@??! Oscillating!@@ !Low!zG!*@~! A@"A@Q@??" Continuous"@@ "Low"ET+@~" A@#B@$@??# Oscillating#@@ #Low#5^I ,@~# B@$B@C@??$ Continuous$@@ $Low$V--@~$ B@%C@B@??% Oscillating%@@ %Low%p= c+@~% C@&C@@S@??& Continuous&@@ &Low&Qk,@~& C@'D@G@??' Oscillating'@@ 'Low'Y-@~' D@(D@P@??( Continuous(@@ (High(S㥛D,@~( D@)E@,@??) Oscillating)@@ )High)E+@~) E@*E@@??* Continuous*@@ *High*;O,@~* E@+F@@Q@??+ Oscillating+@@ +High+M,@~+ F@,F@S@??, Continuous,@@ ,High,bX9,@~, F@-G@O@??- Oscillating-@@ -High-#~j,@~- G@.G@@??. Continuous.@@ .High./$-@~. G@/H@S@??/ Oscillating/@@ /High/~jt-@~/ H@0H@<@??0 Continuous0@@ 0Low0rh+@~0 H@1I@"@??1 Oscillating1@@ 1Low1K7I*@~1 I@2I@R@??2 Continuous2@@ 2Low2xi-@~2 I@3J@O@??3 Oscillating3@@ 3Low3̌+@~3 J@4J@D@??4 Continuous4@@ 4Low4S+@~4 J@5K@T@??5 Oscillating5@@ 5Low5S㥛,@~5 K@6K@4@??6 Continuous6@@ 6Low6/$,@~6 K@7L@2@??7 Oscillating7@@ 7Low7/$,@~7 L@8L@T@??8 Continuous8@@ 8High8!rh,@~8 L@9M@G@??9 Oscillating9@@ 9High9&1,@~9 M@:M@F@??: Continuous:@@ :High:~jt-@~: M@;N@???; Oscillating;@@ ;High;5^I -@~; N@<N@N@??< Continuous<@@ <High<B`",@~< N@=O@@R@??= Oscillating=@@ =High=(\,@~= O@>O@P@??> Continuous>@@ >High>-@~> O@?P@M@??? Oscillating?@@ ?High?V--@~? P@@@P@W@??@ Continuous@@@ @Low@ ףp=J,@~@ @P@AP@Q@??A OscillatingA@@ ALowA"~j+@~A P@BP@V@??B ContinuousB@@ BLowB`"۹+@~B P@CQ@R@??C OscillatingC@@ CLowC$*@~C Q@D@Q@B@??D ContinuousD@@ DLowD7A`,@~D @Q@EQ@@@??E OscillatingE@@ ELowEB`",@~E Q@FQ@>@??F ContinuousF@@ FLowFPn-@~F Q@GR@@??G OscillatingG@@ GLowG7A`P+@~G R@H@R@@U@??H ContinuousH@@ HHighH--@~H @R@IR@V@??I OscillatingI@@ IHighIV--@~I R@JR@S@??J ContinuousJ@@ JHighJZd;ߏ.@~J R@KS@V@??K OscillatingK@@ KHighKK7A`.@~K S@L@S@E@??L ContinuousL@@ LHighLA`"+@~L @S@MS@I@??M OscillatingM@@ MHighMw/+@~M S@NS@H@??N ContinuousN@@ NHighNy&1,@~N S@OT@@T@??O OscillatingO@@ OHighO㥛 ,@~O T@P@T@M@??P ContinuousP@@ PLowP$,@~P @T@QT@0@??Q OscillatingQ@@ QLowQ(\,@~Q T@RT@:@??R ContinuousR@@ RLowRX9ȶ*@~R T@SU@(@??S OscillatingS@@ SLowS$*@~S U@T@U@J@??T ContinuousT@@ TLowT++@~T @U@UU@T@??U OscillatingU@@ ULowUV-r,@~U U@VU@6@??V ContinuousV@@ VLowVK7,@~V U@WV@I@??W OscillatingW@@ WLowW-'+@~W V@X@V@K@??X ContinuousX@@ XHighX)\.@~X @V@YV@;@??Y OscillatingY@@ YHighYJ +.@~Y V@ZV@7@??Z ContinuousZ@@ ZHighZd;O.@~Z V@[W@1@??[ Oscillating[@@ [High[jt-@~[ W@\@W@D@??\ Continuous\@@ \High\S%.@~\ @W@]W@R@??] Oscillating]@@ ]High]v+@~] W@^W@5@??^ Continuous^@@ ^High^ r,@~^ W@_X@ H@ ? ?_! Oscillating_!@!@ _!High_"V-+@~_ X@>dd  =##X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H     8@ 8    (@ 0 8  @  <   @ 0   x@@$x@$x  @$8@ 8 8 8@ 0 8 0@ 0  < 0 @ 0 0 x@@$x@$x  @$ Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??,I} F}F}F}F}F@@@@@@@@@ @ @ @ @ @@@@@@@@@@@@@@@@@ @!@"@#@$@%@&@'@(@)@*@+@& ANOVA Table''''''(Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~.@\(%@?ܵ?镲@H}M? &  A:Susceptor-Rotation Method~?;On?;On?ڊe?Mb?  B:Nozzle Position~?w/?w/?9EGr@-1? #  C:Deposition Temperature~?+ h?+ h?K7A`?_L?  D:Deposition Time~?Ǻ @Ǻ @PnC8@!j>    AB~?_LU?_LU?Ǻv?%u?    AC~?Nё\C?Nё\C?3ı.n?n?   AD~ ? Q? Q?  0*? V/?   BC~ ? '1Z? '1Z?  rh? J4?   BD~ ? JY8? JY8? ڊe? {Pk?   CD~ ? 6@ 6@ lV}(@ -C6J?   ABC~ ? Q|a2? Q|a2? Aǘ? Q?   ABD~??W[??W[?~:?a2U0*?   ACD~?_vO?_vO?48E?镲 q?   BCD~?(\?(\?+ݓ?q= ףp?   ABCD~?a2U0*?a2U0*?0*?!rh?  Residual~T@k 3@ffffff? Pure Error~T@k 3@ffffff?"Total~#W@#;M =@###$% S =oŏ1?R-sq ='9 {? R-sq(adj) =p!F?5Regression Information6666667 )Term*Effect* Coefficient*Standard Error*Low CI*High CI*T Value+P Value, Intercept--R,@-58EGr?-x&1(,@-rh|,@-q@~.$/A:Susceptor-Rotation Method-ףp= ׳-ܵ|У-58EGr?-v-ׁsF?-LJ0Mb?,B:Nozzle Position-Gz?-?-58EGr?-y&1l?-u?->W[?.-1?!/C:Deposition Temperature-ܵ|г-ܵ|У-58EGr?-v-ׁsF?-鷯0_L? ,D:Deposition Time -\(\? -\(\? -58EGr? -47? -B>٬? -ݵ|г@ 1j> !/AB!-_vO~?!-_vOn?!-58EGr?!-?!-/$?!-On?!0%u? "/AC"-Gz"-&†"-58EGr?"-Pn"-46W[?)-Kӿ)0镲 q? */BCD*- h"?*-)\(?*-58EGr?*-Pkw*-`TR'?*-B?*0q= ףp? +2ABCD+3{Gz?+3{Gz?+358EGr?+3&S+3?+3B?+4!rh?>dd  =8X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??@}& F>dd&   $@F@.@ ??   ! 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ThicknessDistribution LineThickness(Distribution Line)Distribution LineThickness Y' = Yd?Non-SignificantNon-SignificantNon-SignificanthA Significant Significant Significanto@  rqABABABd?!?ABCDABCDABCDd?O?ABDABDABDd?_j(?ACDACDACDd?&L?BDBDBDd?1;Z?ADADADd?u-?BCBCBCd?d?C:Deposition TemperatureC:Deposition TemperatureC:Deposition Temperatured?籍?A:Susceptor-Rotation MethodA:Susceptor-Rotation MethodA:Susceptor-Rotation Methodd?.b? ACACACd?l#Z/? ABCABCABCd?>(S\? BCDBCDBCDd?S#^? B:Nozzle PositionB:Nozzle PositionB:Nozzle Positiond?? CDCDCDd?)_־ @D:Deposition TimeD:Deposition TimeD:Deposition Timed?,ݳ@Special Pareto Target Pareto TargetThickness Y' = Yd? A?A?Critical ValueCritical ValueCritical ValueThickness Y' = Yd?A?A?@Non-SignificantNon-SignificantNon-SignificanthA Significant Significant Significanto@   ????{Gz?{Gz?{Gz??333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomatTahoma|Z  @@@@v@v@TahomaDBTahomaDB        #ƚK +  '' & MDCR-O. &MDCR-{  --'' &MDCR-T1;0;-1; &MDCR-F \"Tahoma ww 0w f-!#ReliaSoft DOE++ - www.ReliaSoft.com2 &MDCR-T3;0;0; &MDCR-F &MDCR-S-' &MDCR-T2;0;0; &MDCR-F "Tahoma `ww 0w f- ! 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User Name 6" &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS!6" &MDCR-T6;0;0; &MDCR-F &MDCR-S !8/5/2008Z"6" &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 10:15:55 AM; #6" &MDCR-T6;0;0; &MDCR-F &MDCR-S#6"#& &MDCR-T6;0;0; &MDCR-F &MDCR-}g--"System f !- =X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H x@@ x@ x  @ 8@ 8    (@ 0 8  @  <   @ 0       x@@ x@ x  @ 8@ 8 8 8@ 0 8 0@ 0  < 0 @ 0 0   2008-08-04 12:23:54   dMbP?_*+%&A Page &P&?'?(?)?"d???Q} F}F}F}F}F@@@    @@@@@@@@@@@@@ @!@"@#@$@%@&@'@)@*@+@-@.@/@0@1@2@3@4@5@6@7@8@9@:@;@<@=@>@2008-08-04 12:23:54 Alpha: 0.1Transform: Y' = Y+8"All selected terms are alias free.+8"Terms selected to be in the model: Main Effects A, B, C, D 2-Way Interaction AB, AC, AD, BC, BD, CD 3-Way Interaction ABC, ABD, ACD, BCD 4-Way Interaction ABCD1 8(Independent terms included in the model: Main Effects A, B, C, D2-Way InteractionAB, AC, AD, BC, BD, CD3-Way InteractionABC, ABD, ACD, BCD4-Way Interaction ABCD ANOVA TableSource of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~.@\(%@?ܵ?镲@H}M? &  A:Susceptor-Rotation Method~?;On?;On?ڊe?Mb?  B:Nozzle Position~?w/?w/?9EGr@-1? #  C:Deposition Temperature~?+ h?+ h?K7A`?_L?  D:Deposition Time~?Ǻ @Ǻ @PnC8@!j>    AB~?_LU?_LU?Ǻv?%u?    AC~?Nё\C?Nё\C?3ı.n?n?    AD~?Q?Q? 0*?V/?    BC~?'1Z?'1Z? rh?J4?    BD~?JY8?JY8?ڊe?{Pk?   CD~?6@6@lV}(@-C6J?   ABC~ ? Q|a2? Q|a2? Aǘ? Q? !  ABD~!?!?W[?!?W[?!~:?!a2U0*? !"  ACD~"?"_vO?"_vO?"48E?"镲 q? "#  BCD~#?#(\?#(\?#+ݓ?#q= ףp? #$  ABCD~$?$a2U0*?$a2U0*?$0*?$!rh? $% Residual~%T@%k 3@%ffffff?%& Pure Error~&T@&k 3@&ffffff?&'"Total~'#W@'#;M =@'###$% )&S =)'oŏ1?*&R-sq =*('9 {?+& R-sq(adj) =+(p!F?-)Regression Information-******+ .,Term.-Effect.- Coefficient.-Standard Error.-Low CI.-High CI.-T Value..P Value// Intercept/0/0R,@/058EGr?/0x&1(,@/0rh|,@/0q@~/1$02A:Susceptor-Rotation Method00ףp= ׳00ܵ|У0058EGr?00v00ׁsF?00LJ03Mb?1/B:Nozzle Position10Gz?10?1058EGr?10y&1l?10u?10>W[?11-1?!22C:Deposition Temperature20ܵ|г20ܵ|У2058EGr?20v20ׁsF?20鷯23_L?3/D:Deposition Time30\(\?30\(\?3058EGr?3047?30B>٬?30ݵ|г@34j> 42AB40_vO~?40_vOn?4058EGr?40?40/$?40On?43%u? 52AC50Gz50&†5058EGr?50Pn5046W[?<0Kӿ<3镲 q? =2BCD=0 h"?=0)\(?=058EGr?=0Pkw=0`TR'?=0B?=3q= ףp? >5ABCD>6{Gz?>6{Gz?>658EGr?>6&S>6?>6B?>7!rh?>dd  OptimizationDFolio0B  1234567           V `       `    Continuous21210Low  ? ʡ)@     Oscillating21210Low ? ?7 sh|,@     Continuous61210Low ? ?_ |?5,@     Oscillating61210Low ?? ?9 ̌+@     Continuous21220Low ? ? jt+@     Oscillating21220Low ?? ?# (\5+@     Continuous61220Low ?? ?W Dli+@     Oscillating61220Low ??? ? Zd;,@     Continuous21210High ? ? Pn-@      Oscillating21210High ?? ?V .@      Continuous61210High ?? ?+ 5^I B-@      Oscillating61210High ??? ?Y ?5^I,@      Continuous21220High ?? ?< '1+@      Oscillating21220High ??? ?  Cl*@     Continuous61220High ??? ?G +@     Oscillating61220High ???? ? V-r+@     Continuous21210Low  ?T V)@     Oscillating21210Low ? ?C +@     Continuous61210Low ? ? |?5^+@     Oscillating61210Low ?? ?A y&1,-@     Continuous21220Low ? ?8 Cl+@     Oscillating21220Low ?? ?5 zGa*@     Continuous61220Low ?? ? ">+@     Oscillating61220Low ??? ?! v,@     Continuous21210High ? ?] uVN,@     Oscillating21210High ?? ? FԸ,@     Continuous61210High ?? ?  zG+@     Oscillating61210High ??? ?- ++@     Continuous21220High ?? ?" v,@     Oscillating21220High ??? ?' Dl*@     Continuous61220High ??? ?` n+@     Oscillating61220High ???? ? +@      Continuous21210Low  ? J +V+@! !    Oscillating21210Low ? ?^ zG!*@" "    Continuous61210Low ? ?F ET+@# #    Oscillating61210Low ?? ?  5^I ,@$ $    Continuous21220Low ? ?& V--@% %    Oscillating21220Low ?? ?$ p= c+@& &    Continuous61220Low ?? ?M Qk,@' '    Oscillating61220Low ??? ?. Y-@( (    Continuous21210High ? ?B S㥛D,@) )    Oscillating21210High ?? ? E+@* *    Continuous61210High ?? ? ;O,@+ +    Oscillating61210High ??? ?E M,@, ,    Continuous21220High ?? ?N bX9,@- -    Oscillating21220High ??? ?? #~j,@. .    Continuous61220High ??? ? /$-@/ /    Oscillating61220High ???? ?O ~jt-@0 0    Continuous21210Low  ? rh+@1 1    Oscillating21210Low ? ?  K7I*@2 2    Continuous61210Low ? ?J xi-@3 3    Oscillating61210Low ?? ?> ̌+@4 4    Continuous21220Low ? ?( S+@5 5    Oscillating21220Low ?? ?P S㥛,@6 6    Continuous61220Low ?? ? /$,@7 7    Oscillating61220Low ??? ? /$,@8 8    Continuous21210High ? ?S !rh,@9 9    Oscillating21210High ?? ?/ &1,@: :    Continuous61210High ?? ?, ~jt-@; ;    Oscillating61210High ??? ? 5^I -@< <    Continuous21220High ?? ?= B`",@= =    Oscillating21220High ??? ?I (\,@> >    Continuous61220High ??? ?@ -@? ?    Oscillating61220High ???? ?: V--@@ @    Continuous21210Low  ?\  ףp=J,@A A    Oscillating21210Low ? ?D "~j+@B B    Continuous61210Low ? ?X `"۹+@C C    Oscillating61210Low ?? ?H $*@D D    Continuous21220Low ? ?% 7A`,@E E    Oscillating21220Low ?? ?  B`",@F F    Continuous61220Low ?? ? Pn-@G G    Oscillating61220Low ??? ? 7A`P+@H H    Continuous21210High ? ?U --@I I    Oscillating21210High ?? ?[ V--@J J    Continuous61210High ?? ?L Zd;ߏ.@K K    Oscillating61210High ??? ?Z K7A`.@L L    Continuous21220High ?? ?* A`"+@M M    Oscillating21220High ??? ?3 w/+@N N    Continuous61220High ??? ?0 y&1,@O O    Oscillating61220High ???? ?Q 㥛 ,@P P    Continuous21210Low  ?; $,@Q Q    Oscillating21210Low ? ? (\,@R R    Continuous61210Low ? ? X9ȶ*@S S    Oscillating61210Low ?? ?  $*@T T    Continuous21220Low ? ?4 ++@U U    Oscillating21220Low ?? ?R V-r,@V V    Continuous61220Low ?? ? K7,@W W    Oscillating61220Low ??? ?2 -'+@X X    Continuous21210High ? ?6 )\.@Y Y    Oscillating21210High ?? ? J +.@Z Z    Continuous61210High ?? ? d;O.@[ [    Oscillating61210High ??? ? jt-@\ \    Continuous21220High ?? ?) S%.@] ]    Oscillating21220High ??? ?K v+@^ ^    Continuous61220High ??? ?  r,@_ _    Oscillating61220High ???? ?1 V-+@` `    Thickness,@-@.@??  Susceptor-Rotation Method?@P.5  Nozzle Position?@P.5  Deposition Temperature?P.5  Deposition Time?@P.5   Optimal Solution 1 D  -@ -@ Optimal Solution 2 t8   -@ -@ ư>?   Optimal Solution 1 D  -@ -@ @@@@v@v@TahomaDBTahomaDB o_?k)3?{Gz?k)?gj+?ZӼ?o_?Oz1?333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z ' Folio Data SetContinuous FunctionContinuous FunctionContinuous FunctionFactor vs Responsed?' Folio Data SetDiscrete FunctionDiscrete FunctionDiscrete FunctionFactor vs Responsed?' Folio Data Set(A:Susceptor-Rotation Method vs Thickness(A:Susceptor-Rotation Method vs ThicknessDiscrete FunctionFactor vs Responsed?' Folio Data SetB:Nozzle Position vs ThicknessB:Nozzle Position vs ThicknessContinuous FunctionFactor vs Responsed?' Folio Data Set%C:Deposition Temperature vs Thickness%C:Deposition Temperature vs ThicknessDiscrete FunctionFactor vs Responsed?Folio Data Set Factor Value Factor Value Factor Valued ?Folio Data SetResponse ValueResponse ValueResponse Valued ?  cb ?^ ? @ A B C D E F G H I J K L M N O P Q R S T U V W X Y Z [ \ ] ^ _ ?8@?? Continuous@@ Lowʡ)@~ ?@K@?? Oscillating@@ Lowsh|,@~ @@W@?? Continuous@@ Low|?5,@~ @@L@?? Oscillating@@ Low̌+@~ @@ @?? Continuous@@ Lowjt+@~ @@A@?? Oscillating@@ Low(\5+@~ @@U@?? Continuous@@ LowDli+@~ @ @9@?? Oscillating@@ LowZd;,@~  @"@=@?? Continuous@@ HighPn-@~ "@ $@U@??  Oscillating @@ High .@~ $@ &@E@??  Continuous @@ High 5^I B-@~ &@ (@@V@??  Oscillating @@ High ?5^I,@~ (@ *@N@??  Continuous @@ High '1+@~ *@ ,@*@??  Oscillating @@ High Cl*@~ ,@.@Q@?? Continuous@@ High+@~ .@0@@?? Oscillating@@ HighV-r+@~ 0@1@U@?? Continuous@@ LowV)@~ 1@2@P@?? Oscillating@@ Low+@~ 2@3@@?? Continuous@@ Low|?5^+@~ 3@4@@P@?? Oscillating@@ Lowy&1,-@~ 4@5@L@?? Continuous@@ LowCl+@~ 5@6@J@?? Oscillating@@ LowzGa*@~ 6@7@3@?? Continuous@@ Low">+@~ 7@8@@@?? Oscillating@@ Lowv,@~ 8@9@@W@?? Continuous@@ HighuVN,@~ 9@:@?@?? Oscillating@@ HighFԸ,@~ :@;@&@?? Continuous@@ HighzG+@~ ;@<@F@?? Oscillating@@ High++@~ <@=@A@?? Continuous@@ Highv,@~ =@>@C@?? Oscillating@@ HighDl*@~ >@?@X@?? Continuous@@ Highn+@~ ?@@@@?? Oscillating@@ High+@~ @@ @@.@??  Continuous @@ Low J +V+@~ @@!A@W@??! Oscillating!@@ !Low!zG!*@~! A@"A@Q@??" Continuous"@@ "Low"ET+@~" A@#B@$@??# Oscillating#@@ #Low#5^I ,@~# B@$B@C@??$ Continuous$@@ $Low$V--@~$ B@%C@B@??% Oscillating%@@ %Low%p= c+@~% C@&C@@S@??& Continuous&@@ &Low&Qk,@~& C@'D@G@??' Oscillating'@@ 'Low'Y-@~' D@(D@P@??( Continuous(@@ (High(S㥛D,@~( D@)E@,@??) Oscillating)@@ )High)E+@~) E@*E@@??* Continuous*@@ *High*;O,@~* E@+F@@Q@??+ Oscillating+@@ +High+M,@~+ F@,F@S@??, Continuous,@@ ,High,bX9,@~, F@-G@O@??- Oscillating-@@ -High-#~j,@~- G@.G@@??. Continuous.@@ .High./$-@~. G@/H@S@??/ Oscillating/@@ /High/~jt-@~/ H@0H@<@??0 Continuous0@@ 0Low0rh+@~0 H@1I@"@??1 Oscillating1@@ 1Low1K7I*@~1 I@2I@R@??2 Continuous2@@ 2Low2xi-@~2 I@3J@O@??3 Oscillating3@@ 3Low3̌+@~3 J@4J@D@??4 Continuous4@@ 4Low4S+@~4 J@5K@T@??5 Oscillating5@@ 5Low5S㥛,@~5 K@6K@4@??6 Continuous6@@ 6Low6/$,@~6 K@7L@2@??7 Oscillating7@@ 7Low7/$,@~7 L@8L@T@??8 Continuous8@@ 8High8!rh,@~8 L@9M@G@??9 Oscillating9@@ 9High9&1,@~9 M@:M@F@??: Continuous:@@ :High:~jt-@~: M@;N@???; Oscillating;@@ ;High;5^I -@~; N@<N@N@??< Continuous<@@ <High<B`",@~< N@=O@@R@??= Oscillating=@@ =High=(\,@~= O@>O@P@??> Continuous>@@ >High>-@~> O@?P@M@??? Oscillating?@@ ?High?V--@~? P@@@P@W@??@ Continuous@@@ @Low@ ףp=J,@~@ @P@AP@Q@??A OscillatingA@@ ALowA"~j+@~A P@BP@V@??B ContinuousB@@ BLowB`"۹+@~B P@CQ@R@??C OscillatingC@@ CLowC$*@~C Q@D@Q@B@??D ContinuousD@@ DLowD7A`,@~D @Q@EQ@@@??E OscillatingE@@ ELowEB`",@~E Q@FQ@>@??F ContinuousF@@ FLowFPn-@~F Q@GR@@??G OscillatingG@@ GLowG7A`P+@~G R@H@R@@U@??H ContinuousH@@ HHighH--@~H @R@IR@V@??I OscillatingI@@ IHighIV--@~I R@JR@S@??J ContinuousJ@@ JHighJZd;ߏ.@~J R@KS@V@??K OscillatingK@@ KHighKK7A`.@~K S@L@S@E@??L ContinuousL@@ LHighLA`"+@~L @S@MS@I@??M OscillatingM@@ MHighMw/+@~M S@NS@H@??N ContinuousN@@ NHighNy&1,@~N S@OT@@T@??O OscillatingO@@ OHighO㥛 ,@~O T@P@T@M@??P ContinuousP@@ PLowP$,@~P @T@QT@0@??Q OscillatingQ@@ QLowQ(\,@~Q T@RT@:@??R ContinuousR@@ RLowRX9ȶ*@~R T@SU@(@??S OscillatingS@@ SLowS$*@~S U@T@U@J@??T ContinuousT@@ TLowT++@~T @U@UU@T@??U OscillatingU@@ ULowUV-r,@~U U@VU@6@??V ContinuousV@@ VLowVK7,@~V U@WV@I@??W OscillatingW@@ WLowW-'+@~W V@X@V@K@??X ContinuousX@@ XHighX)\.@~X @V@YV@;@??Y OscillatingY@@ YHighYJ +.@~Y V@ZV@7@??Z ContinuousZ@@ ZHighZd;O.@~Z V@[W@1@??[ Oscillating[@@ [High[jt-@~[ W@\@W@D@??\ Continuous\@@ \High\S%.@~\ @W@]W@R@??] Oscillating]@@ ]High]v+@~] W@^W@5@??^ Continuous^@@ ^High^ r,@~^ W@_X@ H@ ? ?_! Oscillating_!@!@ _!High_"V-+@~_ X@>dd  =5%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H     8@ 8    (@ 0  < 8  @   @ 0   x@@$x@$x  @$8@ 8 8 8@ 0 8 0@ 0  < 8 @ 0 8 x@@$x@$x  @$ Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??I} F}F}F}F}F@@@@@@@@@ @ @ @ @@@@@@@@@& ANOVA Table''''''(Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~@h|?"@|гY@vz%@[g+>  B:Nozzle Position~?w/?w/?Cl @ fc]F? #! C:Deposition Temperature~?+ h?+ h?ec]?`"?  D:Deposition Time~?Ǻ @Ǻ @%:@`y>   CD~?6@6@S)@ Mb@? !Residual~V@8m4@??! Lack of Fit~@d]K?{?J{/L??  ! Pure Error~ V@ H3@ 3?  "Total~ #W@ #;M =@ ###$% S = Ș? R-sq = ӅX? R-sq(adj) =,{؜?5Regression Information6666667 )Term*Effect* Coefficient*Standard Error*Low CI*High CI*T Value+P Value, Intercept--R,@-JY?- y),@-z6>W{,@-镲 vr@~.,B:Nozzle Position-Gz?-?-JY?-F%u{?-46W[q@1`y> 2CD3Gzֿ3Gzƿ3JY?3Fx $п3c]Kȷ3}?5^ 4Mb@?>dd  =,G1*X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p  p  p  p  Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??X High PI Low PI Standard Error High CI Low CI Standard Error High CI Low CIStandard ErrorMean PredictedD:Deposition TimeC:Deposition TemperatureB:Nozzle Position A:Susceptor-Rotation Method Block}F}A F}F}B F}F}F}F} F}F&>dd ƚK 0  '' & MDCR-O. &MDCR-{  --'' &MDCR-T1;0;-1; &MDCR-F \"Tahoma0 uXwaw @wuf-!#ReliaSoft DOE++ - www.ReliaSoft.com2 &MDCR-T3;0;0; &MDCR-F &MDCR-S-' &MDCR-T2;0;0; &MDCR-F "Tahoma0 #Xwaw @wuf-!Optimal Solution 1 &MDCR-T3;0;0; &MDCR-F &MDCR-S >"Tahoma0 wXwaw @wuf-!B:Nozzle Position$, &MDCR-T3;0;0; &MDCR-F &MDCR-S !X = 2R% &MDCR-T3;0;0; &MDCR-F &MDCR-S!C:Deposition Temperature$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = 1210.7392;% &MDCR-T3;0;0; &MDCR-F &MDCR-S!D:Deposition Time$, &MDCR-T3;0;0; &MDCR-F &MDCR-S !X = High%{ &MDCR-T3;0;0; &MDCR-F &MDCR-S! ' &MDCR-T3;0;0; &MDCR-F &MDCR-S>"Tahoma0 +Xwaw @wuf- ! Y = 14.5000 &MDCR-T3;0;0; &MDCR-F &MDCR-S ! (Target)> &MDCR-T3;0;0; &MDCR-F &MDCR-S ! Thickness^. &MDCR-T3;0;0; &MDCR-F &MDCR-S! 7 &MDCR-T3;0;0; &MDCR-F &MDCR-S-  &MDCR-T4;0;0; &MDCR-F   &MDCR-T4;0;0; &MDCR-F" " &MDCR-T4;0;0; &MDCR-F=  = &MDCR-T4;0;0; &MDCR-F  = &MDCR-T4;0;0; &MDCR-F= &MDCR-T4;0;0; &MDCR-F-!  &MDCR-T4;0;0; &MDCR-F\"Tahoma0 |Xwaw @wuf-!2r! &MDCR-T5;0;0; &MDCR-F &MDCR-S!"  " &MDCR-T4;0;0; &MDCR-F!6r! &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F\"Tahoma0 .Xwaw @wuf- !13.716u &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !14.6738 &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !13.907 &MDCR-T5;0;0; &MDCR-F &MDCR-S// &MDCR-T4;0;0; &MDCR-F !14.099 &MDCR-T5;0;0; &MDCR-F &MDCR-SVV &MDCR-T4;0;0; &MDCR-F !14.290 &MDCR-T5;0;0; &MDCR-F &MDCR-S} }  &MDCR-T4;0;0; &MDCR-F !14.481  &MDCR-T5;0;0; &MDCR-F &MDCR-S!  &MDCR-T4;0;0; &MDCR-F\"Tahoma0 Xwaw @wuf- !1210.000# &MDCR-T5;0;0; &MDCR-F &MDCR-S!; ; &MDCR-T4;0;0; &MDCR-F !1220.000# &MDCR-T5;0;0; &MDCR-F &MDCR-S!i i &MDCR-T4;0;0; &MDCR-F !1212.000# &MDCR-T5;0;0; &MDCR-F &MDCR-S!  &MDCR-T4;0;0; &MDCR-F !1214.000# &MDCR-T5;0;0; &MDCR-F &MDCR-S!R R &MDCR-T4;0;0; &MDCR-F !1216.000# &MDCR-T5;0;0; &MDCR-F &MDCR-S!  &MDCR-T4;0;0; &MDCR-F !1218.000#s &MDCR-T5;0;0; &MDCR-F &MDCR-S!   &MDCR-T4;0;0; &MDCR-F!LowDK" &MDCR-T5;0;0; &MDCR-F &MDCR-S!T T &MDCR-T4;0;0; &MDCR-F!High`" &MDCR-T5;0;0; &MDCR-F &MDCR-S--5  /&SMDCR-TK8;600002;1;A:Susceptor-Rotation Method vs Thickness X = -1.000 Y = 14.500 &MDCR-FT r .&RMDCR-TJ8;600002;2;A:Susceptor-Rotation Method vs Thickness X = 1.000 Y = 14.673 &MDCR-F0%8 8 Q J  h\  "n   : Q- i?#Qc;&1MDCR-T)8;600003;0;B:Nozzle Position vs Thickness &MDCR-F?-&PMDCR-TH8;600004;1;C:Deposition Temperature vs Thickness X = -1.000 Y = 13.716 &MDCR-F5  "-&OMDCR-TG8;600004;2;C:Deposition Temperature vs Thickness X = 1.000 Y = 14.5006 &MDCR-F- &(MDCR-T 8;509;0;Factor Value X = -1.000 &MDCR-F~ ~&*MDCR-T"8;509;0;Factor Value X = 1210.739 &MDCR-FT T&'MDCR-T8;509;0;Factor Value X = 1.0007 &MDCR-F-  = &*MDCR-T"8;510;0;Response Value Y = 14.500 &MDCR-F\"Tahoma0 8Xwaw @wuf- ! Optimization! &MDCR-T6;0;0; &MDCR-F &MDCR-S-!& &MDCR-T6;0;0; &MDCR-F!& &MDCR-T6;0;0; &MDCR-F !Factor vs ResponseD!&MDCR-T 7;600000;0;! &MDCR-F &MDCR-S b!b!&MDCR-T 7;600000;0;! &MDCR-F!Continuous Functiona1"&MDCR-T 7;600000;0;! &MDCR-F &MDCR-SE!7!&MDCR-T 7;600001;0;! &MDCR-F!Discrete Function11"&MDCR-T 7;600001;0;" &MDCR-F &MDCR-S!& &MDCR-T6;0;0; &MDCR-F-v!v! &MDCR-T7;509;0; &MDCR-F ! Factor Value 1" &MDCR-T7;509;0; &MDCR-F &MDCR-S-(!(! &MDCR-T7;510;0; &MDCR-F !Response Value1" &MDCR-T7;510;0; &MDCR-F &MDCR-S! #! &MDCR-T6;0;0; &MDCR-F &MDCR-S! ! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 6/25/2009! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 9:30:18 AM7 ! &MDCR-T6;0;0; &MDCR-F &MDCR-S- ! & &MDCR-T6;0;0; &MDCR-F &MDCR-}P--"Systemuf !-   $@F@.@ ??   " GF@$@X@?dEffect Probability 6/25/2009 9:30:23 AM#ReliaSoft DOE++ - www.ReliaSoft.com Alpha = 0.1!Normal Probability Plot of EffectStandardized Effect (T Value) ProbabilityColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****#ReliaSoft DOE++ - www.ReliaSoft.comZ @@@@v@v@TahomaDBTahomaDB o_?_Fj?{Gz?c]Kȵ?gj+?ͪժ?y):?aM?333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z  ThicknessNon-Significant EffectsThickness(Effect Points)Non-Significant EffectsThickness Y' = Yd? ThicknessSignificant EffectsThickness(Effect Points)Significant EffectsThickness Y' = Yd? ThicknessDistribution LineThickness(Distribution Line)Distribution LineThickness Y' = Yd?   ThicknessNon-Significant EffectsThickness(Effect Points)Non-Significant EffectsThickness Y' = Yd?C:Deposition Temperature|@B@ ThicknessSignificant EffectsThickness(Effect Points)Significant EffectsThickness Y' = Yd?CDCDo_R} )@B:Nozzle PositionB:Nozzle Position^Q?@O@D:Deposition TimeD:Deposition Time)tYq@U@ ThicknessDistribution LineThickness(Distribution Line)Distribution LineThickness Y' = Yd?4(\ׅzW>swz> ףp= .4>Gz=i>Qy>(\(lڟ%a>233333 a?< ףp=hQY30?FzG_ƃI?PQB@0fgb?Q}ua y? =?X@C ףp=@)X@933333@񿳳X@/\(@i{X@%Q@A6X@Gz@X@ףp= @"Tahoma3 {pXwaw @wl6f-!Standardized Effect (T Value)f% &MDCR-T3;0;0; &MDCR-F &MDCR-S>"Tahoma]6 fpXwaw @wl6f- ! Probability &MDCR-T3;0;0; &MDCR-F &MDCR-S# &MDCR-T4;0;0; &MDCR-F\"Tahoma3 }pXwaw @wl6f- !-6.000#  &MDCR-T5;0;0; &MDCR-F &MDCR-S# &MDCR-T4;0;0; &MDCR-F !6.000R#& &MDCR-T5;0;0; &MDCR-F &MDCR-S-# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F#55 &MDCR-T4;0;0; &MDCR-F-#T T &MDCR-T4;0;0; &MDCR-F !-3.600# &MDCR-T5;0;0; &MDCR-F &MDCR-S-#s s &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F-# &MDCR-T4;0;0; &MDCR-F !-1.200#> &MDCR-T5;0;0; &MDCR-F &MDCR-S-#   &MDCR-T4;0;0; &MDCR-F#,, &MDCR-T4;0;0; &MDCR-F#KK &MDCR-T4;0;0; &MDCR-F#jj &MDCR-T4;0;0; &MDCR-F-# &MDCR-T4;0;0; &MDCR-F !1.200R# &MDCR-T5;0;0; &MDCR-F &MDCR-S-# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F-### &MDCR-T4;0;0; &MDCR-F !3.600R# &MDCR-T5;0;0; &MDCR-F &MDCR-S-#AA &MDCR-T4;0;0; &MDCR-F#`` &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F !10.000Q# &MDCR-T5;0;0; &MDCR-F &MDCR-S-## &MDCR-T4;0;0; &MDCR-F- &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-FLL &MDCR-T4;0;0; &MDCR-F !50.000 &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-F(( &MDCR-T4;0;0; &MDCR-F>> &MDCR-T4;0;0; &MDCR-F4 4  &MDCR-T4;0;0; &MDCR-F !99.0000 &MDCR-T5;0;0; &MDCR-F &MDCR-S- &MDCR-T4;0;0; &MDCR-F- 1&XMDCR-TP8;2;1;Thickness(Effect Points) C:Deposition Temperature X = -0.807 Y = 37.500 &MDCR-F-" W"# &&BMDCR-T:8;1;1;Thickness(Effect Points) CD X = -3.598 Y = 12.500 &MDCR-F!CD! &MDCR-T9;1;1; &MDCR-F &MDCR-S>!-&PMDCR-TH8;1;2;Thickness(Effect Points) B:Nozzle Position X = 1.799 Y = 62.500 &MDCR-F!B:Nozzle Position3S &MDCR-T9;1;2; &MDCR-F &MDCR-S 6 w-&PMDCR-TH8;1;3;Thickness(Effect Points) D:Deposition Time X = 5.111 Y = 87.500 &MDCR-F!D:Deposition Timeh  &MDCR-T9;1;3; &MDCR-F &MDCR-S-&%#"} `+,Ji\'  6W#)&*MDCR-T"8;3;0;Thickness(Distribution Line) &MDCR-F!Effect Probability &MDCR-T6;0;0; &MDCR-F &MDCR-S- & &MDCR-T6;0;0; &MDCR-F( (& &MDCR-T6;0;0; &MDCR-F  ! ThicknessD &MDCR-T7;2;0; &MDCR-F &MDCR-S !Y' = Y &MDCR-T7;2;0; &MDCR-F &MDCR-S -E! &MDCR-T7;2;0; &MDCR-F!Non-Significant Effects! &MDCR-T7;2;0; &MDCR-F &MDCR-S-! &MDCR-T7;1;0; &MDCR-F!Significant EffectseY! &MDCR-T7;1;0; &MDCR-F &MDCR-S-v vM! &MDCR-T7;3;0; &MDCR-F!Distribution Line ! &MDCR-T7;3;0; &MDCR-F &MDCR-S!  &MDCR-T6;0;0; &MDCR-F &MDCR-S! ! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 6/25/2009Z" &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 9:30:23 AM # &MDCR-T6;0;0; &MDCR-F &MDCR-S-# #& &MDCR-T6;0;0; &MDCR-F &MDCR-}M--"Systeml6f !- =X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H x@@ x@ x  @ 8@ 8    (@ 0  < 8  @   @ 0       x@@ x@ x  @ 8@ 8 8 8@ 0 8 0@ 0  < 8 @ 0 8   2008-08-04 12:23:53   dMbP?_*+%&A Page &P&?'?(?)?"d??&Q} F}F}F}F}F@@@    @@@@@@@@@@@@@@@ @!@"@#@$@%@2008-08-04 12:23:53 Alpha: 0.1Transform: Y' = Y+8"All selected terms are alias free.+8"Terms selected to be in the model: Main EffectsB, C, D 2-Way Interaction CD1 8(Independent terms included in the model:  Main Effects B, C, D 2-Way Interaction CD ANOVA TableSource of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~@h|?"@|гY@vz%@[g+>  B:Nozzle Position~?w/?w/?Cl @ fc]F? #! C:Deposition Temperature~?+ h?+ h?ec]?`"?  D:Deposition Time~?Ǻ @Ǻ @%:@`y>   CD~?6@6@S)@ Mb@? !Residual~V@8m4@??! Lack of Fit~@d]K?{?J{/L?? ! Pure Error~V@H3@3?"Total~#W@#;M =@###$% &S ='Ș?&R-sq =(ӅX?& R-sq(adj) =(,{؜?)Regression Information******+ ,Term -Effect - Coefficient -Standard Error -Low CI -High CI -T Value .P Value!/ Intercept!0!0R,@!0JY?!0 y),@!0z6>W{,@!0镲 vr@~!1"/B:Nozzle Position"0Gz?"0?"0JY?"0F%u{?"046W[q@$4`y> %5CD%6Gzֿ%6Gzƿ%6JY?%6Fx $п%6c]Kȷ%6}?5^ %7Mb@?>dd  ThicknessDExperimentResponse`P  6 Thickness `Pn-@uVN,@S㥛D,@!rh,@--@)\.@ʡ)@V)@J +V+@rh+@ ףp=J,@$,@'1+@v,@bX9,@B`",@A`"+@S%.@jt+@Cl+@V--@S+@7A`,@++@5^I B-@zG+@;O,@~jt-@Zd;ߏ.@d;O.@|?5,@|?5^+@ET+@xi-@`"۹+@X9ȶ*@+@n+@/$-@-@y&1,@ r,@Dli+@">+@Qk,@/$,@Pn-@K7,@.@FԸ,@E+@&1,@V--@J +.@sh|,@+@zG!*@K7I*@"~j+@(\,@Cl*@Dl*@#~j,@(\,@w/+@v+@(\5+@zGa*@p= c+@S㥛,@B`",@V-r,@?5^I,@++@M,@5^I -@K7A`.@jt-@̌+@y&1,-@5^I ,@̌+@$*@$*@V-r+@+@~jt-@V--@㥛 ,@V-+@Zd;,@v,@Y-@/$,@7A`P+@-'+@ `???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU? `D,@D,@D,@D,@D,@D,@:m+@:m+@:m+@:m+@:m+@:m+@ޖ:,@ޖ:,@ޖ:,@ޖ:,@ޖ:,@ޖ:,@ D+@ D+@ D+@ D+@ D+@ D+@|?5-@|?5-@|?5-@|?5-@|?5-@|?5-@+,@+,@+,@+,@+,@+,@l6-@l6-@l6-@l6-@l6-@l6-@^s!,@^s!,@^s!,@^s!,@^s!,@^s!,@mY,@mY,@mY,@mY,@mY,@mY,@D+@D+@D+@D+@D+@D+@2Zh,@2Zh,@2Zh,@2Zh,@2Zh,@2Zh,@mYw+@mYw+@mYw+@mYw+@mYw+@mYw+@6T,@6T,@6T,@6T,@6T,@6T,@S+@S+@S+@S+@S+@S+@.Œ_,@.Œ_,@.Œ_,@.Œ_,@.Œ_,@.Œ_,@ t@+@ t@+@ t@+@ t@+@ t@+@ t@+@ `????????????????????????????????????????????????????????????????????????????????????????????????(\R,@!)?3TS? 333333?    I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD               @Ȩ@Modely)(A?o ?k@ ?6?A:Susceptor-Rotation Method?N_mn? ?=:h@B:Nozzle Position?@$? ?' ?C:Deposition Temperature=?Zi? ?%k6@D:Deposition Timel| >e @ ?p?BCYX#rJ?5"+W? ?j/?ABCD$?Ht7?  @V@Residual;=6@ "@B9? Lack of FitEB o?h @ T@ Pure Error.23@   (\R,@P.5\m~,@Sİ&,@ Interceptk9ݤd?@Ok+q@ &x0Oԣ&x0OԳL)H ?6 2sٿA:Susceptor-Rotation MethodF?k9ݤd?W 7g?7g?i?fFC?B:Nozzle Position?k9ݤd?K? e#ѣe#ѳw#" ? ؿC:Deposition Temperature?k9ݤd?Ůc \?\?ؐ>*?;1e?D:Deposition Timem| >k9ݤd?E\:@ 8v?8v?%L?n/$;#BCX#rJ?k9ݤd?/&(? o?o?iJ+@v,@uVN,@FԸ,@zG+@++@v,@Dl*@n+@+@J +V+@zG!*@ET+@5^I ,@V--@p= c+@Qk,@Y-@S㥛D,@E+@;O,@M,@bX9,@#~j,@/$-@~jt-@rh+@K7I*@xi-@̌+@S+@S㥛,@/$,@/$,@!rh,@&1,@~jt-@5^I -@B`",@(\,@-@V--@ ףp=J,@"~j+@`"۹+@$*@7A`,@B`",@Pn-@7A`P+@--@V--@Zd;ߏ.@K7A`.@A`"+@w/+@y&1,@㥛 ,@$,@(\,@X9ȶ*@$*@++@V-r,@K7,@-'+@)\.@J +.@d;O.@jt-@S%.@v+@ r,@V-+@ `???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU? `:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@ `????????????????????????????????????????????????????????????????????????????????????????????????(\R,@K>? o }>? ?    I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD               @hz%@Model)M2>~|.@"@ ?h~ @B:Nozzle Position.WNRD?$? ?|"#?C:Deposition TemperatureĂ?Zi? ?:@D:Deposition Timebnh>e @ ?F)@CDG` A?(@  V@Residualzl4@ @N? Lack of FitX}?f? V@ Pure Error,WeJ3@    (\R,@P.5+Y{,@wn),@ Intercept"?M vr@  g?g?Io"=?_ {?B:Nozzle PositionPWNRD?"?^Q?  }#ѣ}#ѳ[?*{ NC:Deposition Temperature?"?|@  Ȯ\?Ȯ\?ӻ?R[s7*?D:Deposition Time`nh>"?)tYq@  ͅ)ƿͅ)ֿkŷ{#пCD` A?"?o_R}                              (\R,@g?}#ѣȮ\?ͅ)ƿ   `????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????ffffff?     P.5           I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ?       I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ?    1  ThicknessDExperimentResponsep  7 Thickness `ʡ)@sh|,@|?5,@̌+@jt+@(\5+@Dli+@Zd;,@Pn-@.@5^I B-@?5^I,@'1+@Cl*@+@V-r+@V)@+@|?5^+@y&1,-@Cl+@zGa*@">+@v,@uVN,@FԸ,@zG+@++@v,@Dl*@n+@+@J +V+@zG!*@ET+@5^I ,@V--@p= c+@Qk,@Y-@S㥛D,@E+@;O,@M,@bX9,@#~j,@/$-@~jt-@rh+@K7I*@xi-@̌+@S+@S㥛,@/$,@/$,@!rh,@&1,@~jt-@5^I -@B`",@(\,@-@V--@ ףp=J,@"~j+@`"۹+@$*@7A`,@B`",@Pn-@7A`P+@--@V--@Zd;ߏ.@K7A`.@A`"+@w/+@y&1,@㥛 ,@$,@(\,@X9ȶ*@$*@++@V-r,@K7,@-'+@)\.@J +.@d;O.@jt-@S%.@v+@ r,@V-+@ `???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU? `ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ `TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?(\R,@__1?偷g? ?    I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD               .@ &@ModelL?&'%@ ?Ee?A:Susceptor-Rotation Method?K_mn? ?`=@B:Nozzle Position) 3?`$? ?3Dn`?C:Deposition Temperature>b*?Zi? ?YC8@D:Deposition Time;?)>e @ ?8qv?AB%?@&*.U? ?lJD?ACN?B? ? ѼI*?ADdZ? Q? ?Jh?BCșx?5"+W? ?JqIh?BDuk?=? ?H{(@CDK/3_K?(@ ?X~?ABC/8?J4? ?5 8?ABD G?(fҎ? ?t"G?ACD'A8p?_vO? ?A?BCD&gq?w>? ??!D?ABCD@i?0t7?  T@Residual/23@ T@ Pure Error-23@    (\R,@P.5|,@77-(,@ Intercept0x?Kq@  -&x0Oԣ-&x0OԳ Ս?2:A:Susceptor-Rotation Methodb?0x?.b  g?g?(pu? 潘l?B:Nozzle Positionh 3?0x??  }#ѣ}#ѳ!͐?ZMC:Deposition Temperatureb*?0x?籍  Ȯ\?Ȯ\?Уz?:|N?D:Deposition Time?)>0x?,ݳ@  kuL`n?kuL`~?s$?9* >AB?0x?!?  (mY(mY3˶?%_ACN?0x?l#Z/  dN$X?KxADZ?0x?u-  8v?8v?L?-BCșx?0x?d?   IS*Ύ IS*Ξ$.MW? BDAk?0x?1;Zӿ  ͅ)ƿͅ)ֿ}@`fpVпCD/3_K?0x?)_־   (\?(\??IablABCb08?0x?>(S\?  K{ͅ?K{ͅ?$W=2e?s޾ABD G?0x?_j(?  QQCA;Z?ACDNA8p?0x?&Lӿ   a#? a#?ъn&i?RJ}BCDBgq?0x?S#^?  o?o?h?_aABCD@i?0x?O?                             (\R,@-&x0Oԣg?}#ѣȮ\?kuL`n?(mY8v? IS*Ύͅ)ƿ(\?K{ͅ?Q a#?o?  ffffff?     P.5           I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ?       I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ?    1 Thickness Std.DExperimentResponseP  7Thickness Std. wZ!俘ăRD^;LϋO} 翱ԗc䧺eō32V<1忡D#ώչK o~<p迨,* ???????????????????????????????? ??? ,H,Hy)y)  A,A,,H,Hy)y)  A,A, ????????????????e,ZrN? ;e? @?    I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD               @Mj@Model_+M\?4+? ?;@B:Nozzle Position9}?d#? ?ւ#v4 @C:Deposition TemperaturewΠ?$N,%?  *@Residualh/? ? V@ Lack of FitÈݾ?ςɈz? (@ Pure Error-?    P.5Dt 7d̯" Intercept<e,ZrN?8L  :~pC:~pCVJG7z^3ZB:Nozzle Position9}?e,ZrN?ѝF@  D䢱D䢱u:+bC:Deposition TemperatureΠ?e,ZrN?s                             :~pCD䢱   ?????????????????????????????????????????????????????????????????????????????????????????????????????????     P.5           I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     333333? @      I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     333333? @      I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ? @   1 Variability AnalysisDFolioPB  1234567           V `       `    Continuous21210Low  ? ʡ)@AB?     Oscillating21210Low ? ?7 sh|,@ܒoO?     Continuous61210Low ? ?_ |?5,@Q?     Oscillating61210Low ?? ?9 ̌+@jN?     Continuous21220Low ? ? jt+@ŤKg?     Oscillating21220Low ?? ?# (\5+@{?     Continuous61220Low ?? ?W Dli+@N?     Oscillating61220Low ??? ? Zd;,@ Q ?     Continuous21210High ? ? Pn-@8+ ?      Oscillating21210High ?? ?V .@2N?      Continuous61210High ?? ?+ 5^I B-@؈k?      Oscillating61210High ??? ?Y ?5^I,@?x}?      Continuous21220High ?? ?< '1+@ r%?      Oscillating21220High ??? ?  Cl*@%b>?     Continuous61220High ??? ?G +@^'?     Oscillating61220High ???? ? V-r+@ꖌQ ?     Continuous21210Low  ?T V)@P.5     Oscillating21210Low ? ?C +@P.5     Continuous61210Low ? ? |?5^+@P.5     Oscillating61210Low ?? ?A y&1,-@P.5     Continuous21220Low ? ?8 Cl+@P.5     Oscillating21220Low ?? ?5 zGa*@P.5     Continuous61220Low ?? ? ">+@P.5     Oscillating61220Low ??? ?! v,@P.5     Continuous21210High ? ?] uVN,@P.5     Oscillating21210High ?? ? FԸ,@P.5     Continuous61210High ?? ?  zG+@P.5     Oscillating61210High ??? ?- ++@P.5     Continuous21220High ?? ?" v,@P.5     Oscillating21220High ??? ?' Dl*@P.5     Continuous61220High ??? ?` n+@P.5     Oscillating61220High ???? ? +@P.5      Continuous21210Low  ? J +V+@P.5! !    Oscillating21210Low ? ?^ zG!*@P.5" "    Continuous61210Low ? ?F ET+@P.5# #    Oscillating61210Low ?? ?  5^I ,@P.5$ $    Continuous21220Low ? ?& V--@P.5% %    Oscillating21220Low ?? ?$ p= c+@P.5& &    Continuous61220Low ?? ?M Qk,@P.5' '    Oscillating61220Low ??? ?. Y-@P.5( (    Continuous21210High ? ?B S㥛D,@P.5) )    Oscillating21210High ?? ? E+@P.5* *    Continuous61210High ?? ? ;O,@P.5+ +    Oscillating61210High ??? ?E M,@P.5, ,    Continuous21220High ?? ?N bX9,@P.5- -    Oscillating21220High ??? ?? #~j,@P.5. .    Continuous61220High ??? ? /$-@P.5/ /    Oscillating61220High ???? ?O ~jt-@P.50 0    Continuous21210Low  ? rh+@P.51 1    Oscillating21210Low ? ?  K7I*@P.52 2    Continuous61210Low ? ?J xi-@P.53 3    Oscillating61210Low ?? ?> ̌+@P.54 4    Continuous21220Low ? ?( S+@P.55 5    Oscillating21220Low ?? ?P S㥛,@P.56 6    Continuous61220Low ?? ? /$,@P.57 7    Oscillating61220Low ??? ? /$,@P.58 8    Continuous21210High ? ?S !rh,@P.59 9    Oscillating21210High ?? ?/ &1,@P.5: :    Continuous61210High ?? ?, ~jt-@P.5; ;    Oscillating61210High ??? ? 5^I -@P.5< <    Continuous21220High ?? ?= B`",@P.5= =    Oscillating21220High ??? ?I (\,@P.5> >    Continuous61220High ??? ?@ -@P.5? ?    Oscillating61220High ???? ?: V--@P.5@ @    Continuous21210Low  ?\  ףp=J,@P.5A A    Oscillating21210Low ? ?D "~j+@P.5B B    Continuous61210Low ? ?X `"۹+@P.5C C    Oscillating61210Low ?? ?H $*@P.5D D    Continuous21220Low ? ?% 7A`,@P.5E E    Oscillating21220Low ?? ?  B`",@P.5F F    Continuous61220Low ?? ? Pn-@P.5G G    Oscillating61220Low ??? ? 7A`P+@P.5H H    Continuous21210High ? ?U --@P.5I I    Oscillating21210High ?? ?[ V--@P.5J J    Continuous61210High ?? ?L Zd;ߏ.@P.5K K    Oscillating61210High ??? ?Z K7A`.@P.5L L    Continuous21220High ?? ?* A`"+@P.5M M    Oscillating21220High ??? ?3 w/+@P.5N N    Continuous61220High ??? ?0 y&1,@P.5O O    Oscillating61220High ???? ?Q 㥛 ,@P.5P P    Continuous21210Low  ?; $,@P.5Q Q    Oscillating21210Low ? ? (\,@P.5R R    Continuous61210Low ? ? X9ȶ*@P.5S S    Oscillating61210Low ?? ?  $*@P.5T T    Continuous21220Low ? ?4 ++@P.5U U    Oscillating21220Low ?? ?R V-r,@P.5V V    Continuous61220Low ?? ? K7,@P.5W W    Oscillating61220Low ??? ?2 -'+@P.5X X    Continuous21210High ? ?6 )\.@P.5Y Y    Oscillating21210High ?? ? J +.@P.5Z Z    Continuous61210High ?? ? d;O.@P.5[ [    Oscillating61210High ??? ? jt-@P.5\ \    Continuous21220High ?? ?) S%.@P.5] ]    Oscillating21220High ??? ?K v+@P.5^ ^    Continuous61220High ??? ?  r,@P.5_ _    Oscillating61220High ???? ?1 V-+@P.5` `  ư>?      @@@@v@v@TahomaDBTahomaDB ????{Gz?{Gz?{Gz??333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z   GF ???d Upper Legend Lower LegendCurrent Upper TitleCurrent Lower TitleCurrent Main TitleCurrent X-Axis TitleCurrent Y-Axis TitleColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****Z      ? ? ? ?    Continuous Oscillating 26 @@ LowHigh `????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time   Thickness` Thickness Std.   I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD                   Block 1    1    Continuous Oscillating 26 @@ LowHigh  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time`       1 1 = =##X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p   p@@ p@ p @  p8 @ p@ p p8 8 p@ p p   p8 8  Design   dMbP?_*+%&A Page &P&?'?(?)?"d??` Q _ Thickness Std. ThicknessD:Deposition Time C:Deposition Temperature B:Nozzle Position "A:Susceptor-Rotation Method  Block NumberCenter Points Run OrderStandard Order}F}A F}F}B F}F}GF} FF} F                                 ! " # $ % & ' ( ) * + , - . / 0 1 2 3 4 5 6 7 8 9 : ; < = > ? @ A B C D E F G H I J K L M N O P Q R S T U V W X Y Z [ \ ] ^ _ ?8@?? Continuous@@ Lowʡ)@ B?~ ?@K@?? Oscillating@@ Lowsh|,@ {?~ @@W@?? Continuous@@ Low|?5,@ ڊe?~ @@L@?? Oscillating@@ Low̌+@ a+e?~ @@ @?? Continuous@@ Lowjt+@ H}8g?~ @@A@?? Oscillating@@ Low(\5+@ ea?~ @@U@?? Continuous@@ LowDli+@ B?~ @ @9@?? Oscillating@@ LowZd;,@ "uq ?~  @"@=@?? Continuous@@ HighPn-@ W[?~ "@ $@U@??  Oscillating @@ High .@ ǘ?~ $@ &@E@??  Continuous @@ High 5^I B-@ a+e?~ &@ (@@V@??  Oscillating @@ High ?5^I,@ !lV}?~ (@ *@N@??  Continuous @@ High '1+@ q -?~ *@ ,@*@??  Oscillating @@ High Cl*@  F%u?~ ,@.@Q@?? Continuous@@ High+@ QI&?~ .@0@@?? Oscillating@@ HighV-r+@ ı.n?~ 0@1@U@?? Continuous@@ LowV)@  *~ 1@2@P@?? Oscillating@@ Low+@  *~ 2@3@@?? Continuous@@ Low|?5^+@  *~ 3@4@@P@?? Oscillating@@ Lowy&1,-@  *~ 4@5@L@?? Continuous@@ LowCl+@  *~ 5@6@J@?? Oscillating@@ LowzGa*@  *~ 6@7@3@?? Continuous@@ Low">+@  *~ 7@8@@@?? Oscillating@@ Lowv,@  *~ 8@9@@W@?? Continuous@@ HighuVN,@  *~ 9@:@?@?? Oscillating@@ HighFԸ,@  *~ :@;@&@?? Continuous@@ HighzG+@  *~ ;@<@F@?? Oscillating@@ High++@  *~ <@=@A@?? Continuous@@ Highv,@  *~ =@>@C@?? Oscillating@@ HighDl*@  *~ >@?@X@?? Continuous@@ Highn+@  *~ ?@@@@?? Oscillating@@ High+@  *~ @@ @@.@??  Continuous @@ Low J +V+@ *~ @@!A@W@??! Oscillating!@@ !Low!zG!*@ ! *~! A@"A@Q@??" Continuous"@@ "Low"ET+@ " *~" A@#B@$@??# Oscillating#@@ #Low#5^I ,@ # *~# B@$B@C@??$ Continuous$@@ $Low$V--@ $ *~$ B@%C@B@??% Oscillating%@@ %Low%p= c+@ % *~% C@&C@@S@??& Continuous&@@ &Low&Qk,@ & *~& C@'D@G@??' Oscillating'@@ 'Low'Y-@ ' *~' D@(D@P@??( Continuous(@@ (High(S㥛D,@ ( *~( D@)E@,@??) Oscillating)@@ )High)E+@ ) *~) E@*E@@??* Continuous*@@ *High*;O,@ * *~* E@+F@@Q@??+ Oscillating+@@ +High+M,@ + *~+ F@,F@S@??, Continuous,@@ ,High,bX9,@ , *~, F@-G@O@??- Oscillating-@@ -High-#~j,@ - *~- G@.G@@??. Continuous.@@ .High./$-@ . *~. G@/H@S@??/ Oscillating/@@ /High/~jt-@ / *~/ H@0H@<@??0 Continuous0@@ 0Low0rh+@ 0 *~0 H@1I@"@??1 Oscillating1@@ 1Low1K7I*@ 1 *~1 I@2I@R@??2 Continuous2@@ 2Low2xi-@ 2 *~2 I@3J@O@??3 Oscillating3@@ 3Low3̌+@ 3 *~3 J@4J@D@??4 Continuous4@@ 4Low4S+@ 4 *~4 J@5K@T@??5 Oscillating5@@ 5Low5S㥛,@ 5 *~5 K@6K@4@??6 Continuous6@@ 6Low6/$,@ 6 *~6 K@7L@2@??7 Oscillating7@@ 7Low7/$,@ 7 *~7 L@8L@T@??8 Continuous8@@ 8High8!rh,@ 8 *~8 L@9M@G@??9 Oscillating9@@ 9High9&1,@ 9 *~9 M@:M@F@??: Continuous:@@ :High:~jt-@ : *~: M@;N@???; Oscillating;@@ ;High;5^I -@ ; *~; N@<N@N@??< Continuous<@@ <High<B`",@ < *~< N@=O@@R@??= Oscillating=@@ =High=(\,@ = *~= O@>O@P@??> Continuous>@@ >High>-@ > *~> O@?P@M@??? Oscillating?@@ ?High?V--@ ? *~? P@@@P@W@??@ Continuous@@@ @Low@ ףp=J,@ @ *~@ @P@AP@Q@??A OscillatingA@@ ALowA"~j+@ A *~A P@BP@V@??B ContinuousB@@ BLowB`"۹+@ B *~B P@CQ@R@??C OscillatingC@@ CLowC$*@ C *~C Q@D@Q@B@??D ContinuousD@@ DLowD7A`,@ D *~D @Q@EQ@@@??E OscillatingE@@ ELowEB`",@ E *~E Q@FQ@>@??F ContinuousF@@ FLowFPn-@ F *~F Q@GR@@??G OscillatingG@@ GLowG7A`P+@ G *~G R@H@R@@U@??H ContinuousH@@ HHighH--@ H *~H @R@IR@V@??I OscillatingI@@ IHighIV--@ I *~I R@JR@S@??J ContinuousJ@@ JHighJZd;ߏ.@ J *~J R@KS@V@??K OscillatingK@@ KHighKK7A`.@ K *~K S@L@S@E@??L ContinuousL@@ LHighLA`"+@ L *~L @S@MS@I@??M OscillatingM@@ MHighMw/+@ M *~M S@NS@H@??N ContinuousN@@ NHighNy&1,@ N *~N S@OT@@T@??O OscillatingO@@ OHighO㥛 ,@ O *~O T@P@T@M@??P ContinuousP@@ PLowP$,@ P *~P @T@QT@0@??Q OscillatingQ@@ QLowQ(\,@ Q *~Q T@RT@:@??R ContinuousR@@ RLowRX9ȶ*@ R *~R T@SU@(@??S OscillatingS@@ SLowS$*@ S *~S U@T@U@J@??T ContinuousT@@ TLowT++@ T *~T @U@UU@T@??U OscillatingU@@ ULowUV-r,@ U *~U U@VU@6@??V ContinuousV@@ VLowVK7,@ V *~V U@WV@I@??W OscillatingW@@ WLowW-'+@ W *~W V@X@V@K@??X ContinuousX@@ XHighX)\.@ X *~X @V@YV@;@??Y OscillatingY@@ YHighYJ +.@ Y *~Y V@ZV@7@??Z ContinuousZ@@ ZHighZd;O.@ Z *~Z V@[W@1@??[ Oscillating[@@ [High[jt-@ [ *~[ W@\@W@D@??\ Continuous\@@ \High\S%.@ \ *~\ @W@]W@R@??] Oscillating]@@ ]High]v+@ ] *~] W@^W@5@??^ Continuous^@@ ^High^ r,@ ^ *~^ W@_X@ H@ ? ?_! Oscillating_!@!@ _!High_ V-+@ _ "*~_ X@>dd =5%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H   @   8@ 8 0 8  <   @ 0   x@@ x@ x  @  @   8@ 8 8 0@ 0 8 0  < 0 @ 0 0 x@@ x@ x  @     8@ 8    (@ 0 8  @   @ 0   x@@$x@$x  @$8@ 8 8 8@ 0  < 8 8 @ 0 8 x@@$x@$x  @$ Sheet1 Sheet2   dMbP?_*+%&A Page &P&?'?(?)?"d??Q} F}F}GF}F@@@@@@@@@ @ @ @ @ @@@@@@@@@@@@@@@# ANOVA Table$$$$$$%Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~@z6k@HzG?& A:Susceptor-Rotation Method~?;On?;On?Mb?J +?  B:Nozzle Position~?w/?w/?+ h@? # C:Deposition Temperature~?+ h?+ h?]Fx ?o_?  D:Deposition Time~?Ǻ @Ǻ @Hz6@z( >   BC~ ? '1Z? '1Z? V-? QI?   ABCD~ ? a2U0*? a2U0*? 333333? o_?  Residual~ @V@ ?6@ jMS?   Lack of Fit~ "@ C6 @ _vO? 6>W[?  r?   Pure Error~ T@ k 3@ ffffff? Total~ W@ ;M =@ !">5S = 0.5051 R-sq = 23.1902% R-sq(adj) = 18.0120%4Regression Information5555556&''''''( )Term*Effect* Coefficient*Standard Error*Low CI*High CI*T Value+P Value&''''''(, Intercept--R,@-|?5^?-' &,@-Bi~,@-(~k+q@~.$,A:Susceptor-Rotation Method-ףp= ׳-ܵ|У-|?5^?-Uؿ-Mb?-{/L /J +?,B:Nozzle Position-Gz?-?-|?5^?-a2U0*C?-jt?-^)?.?!,C:Deposition Temperature-ܵ|г-ܵ|У-|?5^?-Uؿ-Mb?-o_/o_?,D:Deposition Time-\(\?-\(\?-|?5^?-[ Ac?-|a2U0*?-c]F@0z( > ,BC-q= ףp?-H}?-|?5^?-H.!-Zd;O?-$?/QI? 1ABCD2{Gz?2{Gz?2|?5^?2N@a2):?2@?3o_?>dd   dMbP?_*+%&A Page &P&?'?(?)?"d??I} F}F}F}F}F@@@@@@@@@ @ @ @@@@@@F ANOVA TableGGGGGGH:Source of Variation;Degrees of Freedom!;Sum of Squares [Partial];Mean Squares [Partial];F Ratio;P Value <=>Model~?@? c??F%u??ŏ1w@@a+e? <=> B:Nozzle Position~????߾???߾??u@@{Gz? <=#> C:Deposition Temperature~??? o_Ή?? o_Ή??K7 @@ -? <=AResidual~?*@?oŏ??_Le???<=A Lack of Fit~???9vz??9vz??faV@??߾? <=A Pure Error~?(@?Pkw??HPsb???<=BTotal~C.@CsF?CCCDE 9S = 7p_Q? 9R-sq = 8uF^? 9 R-sq(adj) = 8ڧ1?SRegression InformationTTTTTTU ITermJEffectJ CoefficientJStandard ErrorJLow CIJHigh CIJT ValueKP ValueL InterceptMMQM-C6?MUM[ AcM&†LNv<LB:Nozzle PositionMXMXM-C6?M[B>٬MF%u{MUN@O{Gz?!PC:Deposition TemperatureQy&1Qy&1Q-C6?Q F%uQgsuQʡEsR -?>dd  =,G1*X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p  p  p  p  Sheet1 Sheet2   dMbP?_*+%&A Page &P&?'?(?)?"d??}F>dd   dMbP?_*+%&A Page &P&?'?(?)?"d??X High PI Low PI Standard Error High CI Low CI Standard Error High CI Low CIStandard ErrorMean PredictedD:Deposition TimeC:Deposition TemperatureB:Nozzle Position A:Susceptor-Rotation Method Block}F}A F}F}B F}F}F}F} F}F >dd ƚK 0  '' & MDCR-O. &MDCR-{  --'' &MDCR-T1;0;-1; &MDCR-F \"TahomaC ^ww 0w/fK-!#ReliaSoft DOE++ - www.ReliaSoft.com2 &MDCR-T3;0;0; &MDCR-F &MDCR-S-' &MDCR-T2;0;0; &MDCR-F "Tahomac ww 0w/fK-!Optimal Solution 7Z &MDCR-T3;0;0; &MDCR-F &MDCR-S >"TahomaC `ww 0w/fK-!Susceptor-Rotation...$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = 1.0000% &MDCR-T3;0;0; &MDCR-F &MDCR-S!Nozzle Position;$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = -1.0000;% &MDCR-T3;0;0; &MDCR-F &MDCR-S!Deposition Temper...$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = 1.0000%- &MDCR-T3;0;0; &MDCR-F &MDCR-S!Deposition Time;$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = -1.0000;%  &MDCR-T3;0;0; &MDCR-F &MDCR-S>"Tahomac ww 0w/fK- ! Y = 0.4772j &MDCR-T3;0;0; &MDCR-F &MDCR-S!Thickness Std. (Minimize) &MDCR-T3;0;0; &MDCR-F &MDCR-S-! &MDCR-T4;0;0; &MDCR-F ! &MDCR-T4;0;0; &MDCR-F$!$ &MDCR-T4;0;0; &MDCR-F/!/ &MDCR-T4;0;0; &MDCR-F= != &MDCR-T4;0;0; &MDCR-F!!= &MDCR-T4;0;0; &MDCR-F= &MDCR-T4;0;0; &MDCR-F-"! &MDCR-T4;0;0; &MDCR-F\"TahomaC cww 0w/fK-!1|" &MDCR-T5;0;0; &MDCR-F &MDCR-S"g !g &MDCR-T4;0;0; &MDCR-F!2|"% &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F\"Tahomac ww 0w/fK- !0.468RR &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !0.527RP &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !0.480RR &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !0.492RQ &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !0.504RQ &MDCR-T5;0;0; &MDCR-F &MDCR-S   &MDCR-T4;0;0; &MDCR-F !0.515RQ  &MDCR-T5;0;0; &MDCR-F &MDCR-S" ! &MDCR-T4;0;0; &MDCR-F\"TahomaC jww 0w/fK-!1|" &MDCR-T5;0;0; &MDCR-F &MDCR-S"r!r &MDCR-T4;0;0; &MDCR-F!2|"0 &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F !-1.000V$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"~!~ &MDCR-T4;0;0; &MDCR-F !1.000R$< &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F !-0.600V$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F !-0.200V$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"=!= &MDCR-T4;0;0; &MDCR-F !0.200R$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"]!] &MDCR-T4;0;0; &MDCR-F !0.600R$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F!1|" &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F!2|"G &MDCR-T5;0;0; &MDCR-F &MDCR-S--)0&UMDCR-TM8;600002;1;Susceptor-Rotation Method vs Thickness Std. X = -1.000 Y = 0.477 &MDCR-F) 5 /&TMDCR-TL8;600002;2;Susceptor-Rotation Method vs Thickness Std. X = 1.000 Y = 0.477 &MDCR-F)  +&KMDCR-TC8;600003;1;Nozzle Position vs Thickness Std. X = -1.000 Y = 0.477 &MDCR-F@*&JMDCR-TB8;600003;2;Nozzle Position vs Thickness Std. X = 1.000 Y = 0.468 &MDCR-F0%"k  C   d<]5}#&;MDCR-T38;600004;0;Deposition Temperature vs Thickness Std.? &MDCR-F)+&KMDCR-TC8;600005;1;Deposition Time vs Thickness Std. X = -1.000 Y = 0.477 &MDCR-F)W*&JMDCR-TB8;600005;2;Deposition Time vs Thickness Std. X = 1.000 Y = 0.477 &MDCR-F-g !g &'MDCR-T8;509;0;Factor Value X = 1.000 &MDCR-F ! &(MDCR-T 8;509;0;Factor Value X = -1.000 &MDCR-F~!~&'MDCR-T8;509;0;Factor Value X = 1.0000 &MDCR-F!&(MDCR-T 8;509;0;Factor Value X = -1.000 &MDCR-F-= &)MDCR-T!8;510;0;Response Value Y = 0.477 &MDCR-F\"Tahomac ww 0w/fK-!Variability Analysis! &MDCR-T6;0;0; &MDCR-F &MDCR-S-!& &MDCR-T6;0;0; &MDCR-F!& &MDCR-T6;0;0; &MDCR-F !Factor vs ResponseD!&MDCR-T 7;600000;0;! &MDCR-F &MDCR-S b!b!&MDCR-T 7;600000;0;! &MDCR-F!Continuous Functions1"&MDCR-T 7;600000;0;! &MDCR-F &MDCR-SE!7!&MDCR-T 7;600001;0;! &MDCR-F!Discreet Function11"&MDCR-T 7;600001;0;" &MDCR-F &MDCR-S!& &MDCR-T6;0;0; &MDCR-F-v!v! &MDCR-T7;509;0; &MDCR-F ! Factor Value 1" &MDCR-T7;509;0; &MDCR-F &MDCR-S-(!(! &MDCR-T7;510;0; &MDCR-F !Response Value1" &MDCR-T7;510;0; &MDCR-F &MDCR-S ! User's Name;! &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 1/25/2008| ! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 2:05:54 PM-!! &MDCR-T6;0;0; &MDCR-F &MDCR-S-!!!& &MDCR-T6;0;0; &MDCR-F &MDCR-}W--"SystemK/fK !8-   $@F@.@ ??   ! GF@$@X@?dEffect Probability)User Name Company 8/5/2008 10:15:43 AM#ReliaSoft DOE++ - www.ReliaSoft.com Alpha = 0.15!Normal Probability Plot of EffectStandardized Effect (T Value) ProbabilityColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****#ReliaSoft DOE++ - www.ReliaSoft.comZ @@@@v@v@TahomaDBTahomaDB o_?_Fj?{Gz?c]Kȵ?gj+?ͪժ?y):?#G?333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z rqThickness Std.Significant EffectsThickness Std.(Effect Points)Significant Effects Thickness Std. Y' = Natural Logd?Thickness Std.Distribution Line!Thickness Std.(Distribution Line)Distribution Line Thickness Std. Y' = Natural Logd?  Thickness Std.Significant EffectsThickness Std.(Effect Points)Significant Effects Thickness Std. Y' = Natural Logd?B:Nozzle PositionB:Nozzle PositionѝF@9@C:Deposition TemperatureC:Deposition TemperaturesR@Thickness Std.Distribution Line!Thickness Std.(Distribution Line)Distribution Line Thickness Std. Y' = Natural Logd?4(\ׅzW>swz> ףp= .4>Gz=i>Qy>(\(lڟ%a>233333 a?< ףp=hQY30?FzG_ƃI?PQB@0fgb?Q}ua y? =?X@C ףp=@)X@933333@񿳳X@/\(@i{X@%Q@A6X@Gz@X@ףp= @"Tahoma2 h ww 0w% f-!Standardized Effect (T Value)f%n &MDCR-T3;0;0; &MDCR-F &MDCR-S>"Tahoma ww 0w% f- ! 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User Name ! &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS!! &MDCR-T6;0;0; &MDCR-F &MDCR-S !8/5/2008Z"! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 10:15:43 AM; #! &MDCR-T6;0;0; &MDCR-F &MDCR-S-#!#& &MDCR-T6;0;0; &MDCR-F &MDCR-}H--"System% f !@-> =X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H x@@ x@ x  @ 8@ 8    (@ 0 8  @   @ 0       x@@ x@ x  @ 8@ 8 8 8@ 0  < 8 8 @ 0 8   x@@ x@ x  @ 8@ 8    (@ 0 8  @   @ 0   x@@ x@ x  @ 8@ 8 8 8@ 0  < 8 8 @ 0 8 2008-08-04 12:23:522009-06-23 10:59:16   dMbP?_*+%&A Page &P&?'?(?)?"d?? Q} F}F}F}F}F@@@   @@@@@@@@@@@@@@@@@2008-08-04 12:23:52 Alpha: 0.15Transform: Y' = ln Y+5"All selected terms are alias free.+5"Terms selected to be in the model: Main Effects B, C1 5(Independent terms included in the model:  Main Effects B, C  ANOVA Table Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~@ c?F%u?ŏ1w@a+e?  B:Nozzle Position~??߾??߾?u@{Gz? # C:Deposition Temperature~? o_Ή? o_Ή?K7 @ -?  Residual~*@oŏ?_Le? Lack of Fit~?9vz?9vz?faV@?߾?  Pure Error~(@Pkw?HPsb?!Total~".@"sF?"""#$ %S =&p_Q?%R-sq ='uF^?% R-sq(adj) ='ڧ1?(Regression Information))))))* +Term,Effect, Coefficient,Standard Error,Low CI,High CI,T Value-P Value. 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